Imaging of Electrically Detected Magnetic Resonance of a Silicon Wafer

Sato, Toshiyuki; Yokoyama, Hidekatsu; Ohya, Hiroaki; Kamada, Hitoshi

doi:10.1006/jmre.2001.2427

Cited by 5 publications

(6 citation statements)

References 18 publications

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“…However, one of the assets of this approach is the ability to laterally vary the position of the antenna probe such that one can profile the EDMR response across the device. Spatially resolved EDMR was first demonstrated by Sato et al 29 and Katz et al 30 by utilizing magnetic field gradients that were swept across the device under test. This allowed for spatial tuning of the exact resonance condition, with resolution in millimeters and tens of microns.…”

Section: Resultsmentioning

confidence: 99%

Slow- and rapid-scan frequency-swept electrically detected magnetic resonance of MOSFETs with a non-resonant microwave probe within a semiconductor wafer-probing station

McCrory

Anders

Ryan

et al. 2019

Review of Scientific Instruments

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We report on a novel electron paramagnetic resonance (EPR) technique that merges electrically detected magnetic resonance (EDMR) with a conventional semiconductor wafer probing station. This union, which we refer to as wafer-level EDMR (WL- EDMR), allows EDMR measurements to be performed on an unaltered, fully processed semiconductor wafer. Our measurements replace the conventional EPR microwave cavity or resonator with a very small non-resonant near-field microwave probe. Bipolar amplification effect, spin dependent charge pumping, and spatially resolved EDMR are demonstrated on various planar 4H-silicon carbide metal-oxide-semiconductor field-effect transistor (4H-SiC MOSFET) structures. 4H-SiC is a wide bandgap semiconductor and the leading polytype for high-temperature and high-power MOSFET applications. These measurements are made via both “rapid scan” frequency-swept EDMR and “slow scan” frequency swept EDMR. The elimination of the resonance cavity and incorporation with a wafer probing station greatly simplifies the EDMR detection scheme and offers promise for widespread EDMR adoption in semiconductor reliability laboratories.

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Section: Resultsmentioning

confidence: 99%

Slow- and rapid-scan frequency-swept electrically detected magnetic resonance of MOSFETs with a non-resonant microwave probe within a semiconductor wafer-probing station

McCrory

Anders

Ryan

et al. 2019

Review of Scientific Instruments

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“…This approach is technically very simple but is very ineffective when the spectral linewidth of the sample is broad, leading to a very crude spatial separation. Thus, as an example, the only previously reported attempt to obtain EDMR-based images made use of CW EDMR data acquisition in a large silicon plate, under gradients of ~0.2 T/m, which resulted in an image resolution of ~1.9 mm (19). Clearly, such limited resolution is of no use to the vast majority of modern electronic devices of relevance and consequently this approach did not lead to any further insights.…”

Section: Introductionmentioning

confidence: 99%

High resolution in-operando microimaging of solar cells with pulsed electrically-detected magnetic resonance

Katz

Fehr

Schnegg

et al. 2015

Journal of Magnetic Resonance

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The investigation of paramagnetic species (such as point defects, dopants, and impurities) in solid-state electronic devices is significant because of their effect on device performance. Conventionally, these species are detected and imaged using the electron spin resonance (ESR) technique. In many instances, ESR is not sensitive enough to deal with miniature devices having small numbers of paramagnetic species and high spatial heterogeneity. This limitation can in principle be overcome by employing a more sensitive method called electrically-detected magnetic resonance, which is based on measuring the effect of paramagnetic species on the electric current of the device while inducing electron spin-flip transitions. However, up until now, measurement of the current of the device could not reveal the spatial heterogeneity of its paramagnetic species. We provide here, for the first time, high resolution microimages of paramagnetic species in operating solar cells obtained through electrically-detected magnetic resonance. The method is based on unique microwave pulse sequences for excitation and detection of the electrical signal under a static magnetic field and powerful pulsed magnetic field gradients that spatially encode the electrical current of the sample. The approach developed here can be widely used in the nondestructive threedimensional inspection and characterization of paramagnetic species in a variety of electronic devices. Key Words: ESR; EPR; Electrically-Detected Magnetic Resonance; Semiconductor Defects 3 Significance statementThe detection and imaging of point defects, dopants, and impurities in solid-state devices is significant because of their effect on device performance. Conventionally, these species are observed using electron spin resonance, which suffers from limited sensitivity and spatial resolution. Recently, an alternative and much more sensitive detection method has emerged, based on measuring the effect of these so-called paramagnetic species on the device's electric current. However, this electrical detection method could not be used to obtain high resolution images of paramagnetic species in heterogeneous samples. We present here a recent methodological development that provides, for the first time, highresolution microimages of the paramagnetic species in an operating device (solar cell) obtained through a combination of pulsed electrical detection and MRI-like imaging protocols.4

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“…The only EDMR imaging experiments published to date were performed by Sato et al between 2000 and 2004. [12][13][14] They developed a 900 MHz EDMR imaging system employing a gradient field technique to obtain EDMR images. 12,13 Using this setup the authors could visualize the recombination pattern of photo-generated charge carriers at a Si/SiO 2 -interface with a spatial resolution better than ≈ 2 mm.…”

Section: Introductionmentioning

confidence: 99%

“…[12][13][14] They developed a 900 MHz EDMR imaging system employing a gradient field technique to obtain EDMR images. 12,13 Using this setup the authors could visualize the recombination pattern of photo-generated charge carriers at a Si/SiO 2 -interface with a spatial resolution better than ≈ 2 mm. 13 In contrast to EDMR, there is a strong ongoing effort to improve the spatial resolution of ESR imaging setups to achieve sub-micrometer resolution.…”

Section: Introductionmentioning

confidence: 99%

The electrically detected magnetic resonance microscope: Combining conductive atomic force microscopy with electrically detected magnetic resonance

Klein

Hauer

Stoib

et al. 2013

Review of Scientific Instruments

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We present the design and implementation of a scanning probe microscope, which combines electrically detected magnetic resonance (EDMR) and (photo-)conductive atomic force microscopy ((p)cAFM). The integration of a 3-loop 2-gap X-band microwave resonator into an AFM allows the use of conductive AFM tips as a movable contact for EDMR experiments. The optical readout of the AFM cantilever is based on an infrared laser to avoid disturbances of current measurements by absorption of straylight of the detection laser. Using amorphous silicon thin film samples with varying defect densities, the capability to detect a spatial EDMR contrast is demonstrated. Resonant current changes as low as 20 fA can be detected, allowing the method to realize a spin sensitivity of 8×10(6)spins/√Hz at room temperature.

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Imaging of Electrically Detected Magnetic Resonance of a Silicon Wafer

Cited by 5 publications

References 18 publications

Slow- and rapid-scan frequency-swept electrically detected magnetic resonance of MOSFETs with a non-resonant microwave probe within a semiconductor wafer-probing station

Slow- and rapid-scan frequency-swept electrically detected magnetic resonance of MOSFETs with a non-resonant microwave probe within a semiconductor wafer-probing station

High resolution in-operando microimaging of solar cells with pulsed electrically-detected magnetic resonance

The electrically detected magnetic resonance microscope: Combining conductive atomic force microscopy with electrically detected magnetic resonance

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