Impact of Gate Etch Damage and Profile in High Density DRAM Cell

Kim, Ilgweon; Bae, Jung-wan; Choy, Jun‐Ho; Kim, Nam-Sung; Kweon, Young-Woo; Choi, Se-Kyoung; Kim, Sung‐Chul; Park, Joo-Seog; Kim, Ji-Byum

doi:10.7567/ssdm.2001.a-2-4

Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials 2001

DOI: 10.7567/ssdm.2001.a-2-4

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Impact of Gate Etch Damage and Profile in High Density DRAM Cell

Ilgweon Kim¹,

Jung-wan Bae²,

Jun‐Ho Choy³

et al.

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Impact of Gate Etch Damage and Profile in High Density DRAM Cell

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