2017
DOI: 10.1021/acs.chemmater.6b05200
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Impact of Relative Humidity during Spin-Deposition of Metal Oxide Thin Films from Aqueous Solution Precursors

Abstract: Relative humidity during the spin-processing of thin film solution precursors is often not controlled or measured, and its effect on film thickness is generally unappreciated. Herein, we report that the relative humidity during spin-processing has a marked impact on the film thickness of amorphous metal oxide (aluminum oxide and lanthanum zirconium oxide) and hafnium oxide-sulfate (HafSOx) thin films deposited from aqueous precursors. In the humidity range studied [20–95% relative humidity (RH)], film thicknes… Show more

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Cited by 26 publications
(21 citation statements)
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“…In the following works, the simple and ecofriendly water‐inducement method was demonstrated to be compatible with a wide range of solution‐based film fabrication techniques (e.g., spin/spray coating and printing) . It is noted that the environmental humidity had great effect on the film coating process and the low humidity (<20%) was mandatory for the uniform film formation and the good device performance …”
Section: Metal Oxide Tftsmentioning
confidence: 97%
“…In the following works, the simple and ecofriendly water‐inducement method was demonstrated to be compatible with a wide range of solution‐based film fabrication techniques (e.g., spin/spray coating and printing) . It is noted that the environmental humidity had great effect on the film coating process and the low humidity (<20%) was mandatory for the uniform film formation and the good device performance …”
Section: Metal Oxide Tftsmentioning
confidence: 97%
“…The low areal capacitance could be ascribed to the thicker Al 2 O 3 layer ( d = 100 nm), incurring large operating TFT voltage at the same time. Besides specific choose of solute and solvent, environmental humidity during coating (<20%) is particularly important to obtain uniform WI oxide films …”
Section: Low Temperature Routes For Flexible and Printed High κ Oxidementioning
confidence: 99%
“…We ascribe the variability to fluctuations in the humidity of the laboratory during the film preparation (see Supplementary Fig. 9), which is a parameter affecting the spin-coating deposition from aqueous solutions 56,57 . The variability of the thickness of samples prepared on the same day from the same solution is 4%, while a systematic deviation between the thicknesses from the two solutions of 5% was found.…”
Section: % Rhmentioning
confidence: 99%