“…The electrode material must have a low impedance and also be compatible with lithography and patterning techniques. Gold [40], [41], [77], [107], [109], [112], [121], [122], [126], [129]- [132], [136], [138], [139], [141], [147], [148], platinum [125], [134], [142], indium tin oxide (ITO) [118], [124], [140], [146], iridium [120], [128], [147], polysilicon [149], and carbon [150] have all been used as electrode materials. The electrode material can be sputtered, evaporated, deposited by PECVD, or even screen printed.…”