2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim Incorpo 2011
DOI: 10.1109/iqec-cleo.2011.6194151
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Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging

D. M. Kane
1
,
Richard J. Chater
2
,
David S. McPhail
3

Abstract: Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.

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