Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Shahmarvandi, Ehsan Karimi; Ghaderi, M.; Ayerden, P.; Graaf, G. de; Wolffenbuttel, R.F.

doi:10.1016/j.proeng.2016.11.433

Cited by 5 publications

(3 citation statements)

References 5 publications

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“…This is because the targeted gases mentioned above have their absorption features in this area of the electromagnetic field [ 14 , 15 , 16 , 17 , 18 , 19 ], as one can see in Figure 1 . Mid-IR gas sensor types are different in cost and efficiency, depending on their configuration [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 ]. Some of the most sensitive systems (sensitivity up to parts-per-trillion concentration), such as the mid-infrared sensor system based on continuous-wave (CW) interband cascade laser (ICL) [ 16 ], or those based on Tuneable Diode Laser Absorption Spectroscopy (TDLAS), Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) [ 15 ], include laser as emitting sources.…”

Section: Introductionmentioning

confidence: 99%

“…Recent studies have reported as an alternative to laser-based gas sensors IR quasi-monochromatic sources that use “perfect” absorbers based on metamaterial [ 20 , 21 , 22 , 23 , 24 , 29 , 30 ]. The advantage of this type of IR source is the wavelength selectivity, having the possibility to be tuned within UV up to the THz range, only by changing the type of material and the geometrical configuration [ 22 , 25 , 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

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Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

et al. 2022

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In this paper, we propose a highly selective and efficient gas detection system based on a narrow-band IR metasurface emitter integrated with a resistive heater. In order to develop the sensor for the detection of specific gases, both the microheater and metasurface structures have been optimized in terms of geometry and materials. Devices with different metamaterial structures and geometries for the heater have been tested. Our prototype showed that the modification of the spectral response of metasurface-based structures is easily achieved by adapting the geometrical parameters of the plasmonic micro-/nanostructures in the metasurface. The advantage of this system is the on-chip integration of a thermal source with broad IR radiation with the metasurface structure, obtaining a compact selective radiation source. From the experimental data, narrow emission peaks (FWHM as low as 0.15 μm), corresponding to the CO2, CH4, and CO absorption bands, with a radiant power of a few mW were obtained. It has been shown that, by changing the bias voltage, a shift of a few tens of nm around the central emission wavelength can be obtained, allowing fine optimization for gas detection applications.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

et al. 2022

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“…In terms of absorption layer materials, in the past, we usually used black gold [14] to enhance the IR absorption of detectors. But now various absorber layer structures or mat erials such as carbon nanotubes [15], multi-film structures [16] and metamaterial structures [17] are used in thermopile IR detectors. As a result, the performance of thermopile IR detectors has been greatly improved.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Wang

Zhou

et al. 2018

J. Micromech. Microeng.

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This paper presents the design, fabrication and characterization of a CMOS-compatible thermopile infrared (IR) detector with self-test function based on XeF2 front-side dry etching. In order to achieve better performance, a heavily doped N/P-polysilicon is utilized to form thermocouples, and front-side isotropic etching is adopted to release and thermal isolation. At the same time, a platinum heater on the absorption layer is designed to serve as a heat source to realize the self-test function of the thermopile IR detector. IR radiation sensing shows that the detector achieves relatively high responsivity of 160.03 V W−1 and detectivity of and a extremely short response time of 2.5 ms in air at room temperature. In addition, a self-test measurement is conducted and validated by applying a voltage to the heater. Compared with traditional methods for detecting thermopile performance, this method has obvious convenience and simplicity, which provides an effective way for performance monitoring of thermal-based devices.

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Design of a metamaterial inspired omega shaped resonator based sensor for industrial implementations

Altıntaş

Aksoy

Ünal

2020

Physica E: Low-dimensional Systems and Nanostructures

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Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Cited by 5 publications

References 5 publications

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Design of a metamaterial inspired omega shaped resonator based sensor for industrial implementations

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