Passivation techniques are regarded as an effective strategy to obtain high-efficiency crystalline silicon (c-Si) solar cells. These include field-effect passivation and chemical passivation. [1] Among high-performance devices, intrinsic hydrogenated amorphous silicon (i-a-Si:H) provides outstanding chemical passivation on the surface of c-Si by saturating the dangling bonds and thus reducing the density of interface. Then, with the addition of thin doped silicon films, transparent conducting oxides (TCOs), and metal contacts, silicon heterojunction (SHJ) solar cells with an open-circuit voltage (V oc ) of 750 mV have been achieved. [2] To achieve high V oc , many efforts have been endeavored, such as pretreatment of silicon wafer surface before i-a-Si:H deposition, [3][4][5][6] controlling i-a-Si:H deposition, [7][8][9] suppressing epitaxial growth, [7] plasma treatment (PT) after i-a-Si:H deposition. [10][11][12][13][14] Hydrogen plasma treatment (HPT) is an effective approach to improve a-Si:H/c-Si interface passivation. However, etching [15] and crystallization of a-Si:H [16] induced by HPT, indicate that its application in passivation should be treated with care.For SHJ, the optical losses mainly lie in doped a-Si:H and TCO due to reflection and parasitic absorption, especially at the doped layer on the illuminated side of SHJ. [17,18] Compared with doped a-Si:H or hydrogenated amorphous silicon oxide (a-SiO x :H) layers, hydrogenated nanocrystalline silicon (nc-Si:H) or hydrogenated nanocrystalline silicon oxide (nc-SiO x :H) as window layers have a better potential to improve the short-circuit current density ( J SC ) of SHJ solar cells due to its