Improved block copolymer domain dispersity on chemical patterns via homopolymer-blending and molecular transfer printing

Manipulating the processing window of directed self-assembly in contact hole shrinking with binary block copolymer/homopolymer blending

“…Blending of block copolymers with homopolymers or block copolymers with different molecular weights has been considered as a versatile strategy to extend the self-assembly geometries 21 , 22 , 23 , 24 and period 25 , 26 in a thin film state. We have reported the blending of different types of block copolymers to tune the assembly period of cylindrical patterns because of variations of the configurational entropy and translational entropy.…”