Improved Field Emission Characteristics with Different Electrode Materials by Forming Process in a Quasi-Planar Thin Film Field Emission Diode

Abstract

The essay was reported the different electrode materials in a quasi-planar thin film field emission diode for different forming process. The forming process causes an increased surface roughness of emitters or reduced the work function of the emitter and results in a higher field enhancement factor, which shows better field emission characteristics. The turn on voltage could from 15 V to 8 V and 6.5V with Co and Pd electrode at the emission current of 100 nA for samples.