2019
DOI: 10.3390/s19020374
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Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices

Abstract: Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low powe… Show more

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Cited by 25 publications
(11 citation statements)
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“…Furthermore, the influence of the microheater on the sensing behavior has recently been reported in [112]. When slight openings were introduced in the microheater, the temperature uniformity, mechanical stability, and the sensitivity of the gas sensor improved at no cost to the power consumption.…”
Section: Modeling the Thermal Responsementioning
confidence: 99%
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“…Furthermore, the influence of the microheater on the sensing behavior has recently been reported in [112]. When slight openings were introduced in the microheater, the temperature uniformity, mechanical stability, and the sensitivity of the gas sensor improved at no cost to the power consumption.…”
Section: Modeling the Thermal Responsementioning
confidence: 99%
“…Recent studies also show that the adsorption mechanism of formaldehyde (CH2O) and ethanol (C2H5OH) on SnO2 with platinum nanoparticles can be described using the Langmuir isotherm model [112,125]. The authors consider the overall resistance of the sensing film as i resistances R in parallel, where each R is composed of k resistances r in series.…”
Section: Modeling the Smo Sensing Mechanismmentioning
confidence: 99%
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“…Additionally, effect of doping and nanocomposite forming with C-based material (especially carbon nanotubes) were studied. Advantages and disadvantages of semiconductor metal oxides (reprinted from study of [12] with their permission).…”
Section: Introductionmentioning
confidence: 99%
“…This is thanks to their capability to exhibit large electrical resistance variations upon exposure to low concentrations of different chemicals, and to the availability of cheap synthesis methods compatible with production at large scale [1,2]. Moreover, their reduced size, weight and power consumption, merged with their compatibility with silicon technology, makes MOX-based chemiresistors ideal candidates for the development of portable devices [3][4][5].…”
Section: Introductionmentioning
confidence: 99%