2011
DOI: 10.2528/pier11050501
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Improving Silicon Integrated Antennas by Substrate Micromachining: A Study of Etching Patterns

Abstract: Abstract-One of the main drawbacks of antenna integration on standard CMOS silicon substrates are the low radiation efficiency levels obtained due to the high silicon losses. This paper studies the use of micromachining techniques to remove silicon beneath the antenna as a solution to improve radiation efficiency. Several etching patterns are analyzed for different etching depths through simulations and measurements in order to find out which are the best ones for the micromachining process. Results are verifi… Show more

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Cited by 3 publications
(3 citation statements)
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“…To avoid the electromagnetic compatibility problems caused by the metallic support of the transmitter (Tx) antenna, a non-conductive PVC (polyvinyl chloride) support was manufactured, since this material has dielectric properties similar to air. This solution has already been used in other works because of its low cost and because it allows to manufacture very robust structures by assembling plumbing pipes and joints [53][54][55][56]. The effects of this type of support have been considered negligible in some studies [57].…”
Section: Issues Related To the Anechoic Chamber Measurementsmentioning
confidence: 99%
“…To avoid the electromagnetic compatibility problems caused by the metallic support of the transmitter (Tx) antenna, a non-conductive PVC (polyvinyl chloride) support was manufactured, since this material has dielectric properties similar to air. This solution has already been used in other works because of its low cost and because it allows to manufacture very robust structures by assembling plumbing pipes and joints [53][54][55][56]. The effects of this type of support have been considered negligible in some studies [57].…”
Section: Issues Related To the Anechoic Chamber Measurementsmentioning
confidence: 99%
“…It should be mentioned that the theories developed in [23][24][25] lead to contradictory or incomplete results according to Eqs. (4) and (5). Here, we only use the Eqs.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…Due to the compatibility of the fabrication technology with micro-electronics, silicon photonics has attracted a lot of interests [4][5][6].…”
Section: Introductionmentioning
confidence: 99%