Improving the performance of light-sensitive developer-soluble anti-reflective coatings by using adamantyl terpolymers

PAG and Quencher Effects on DBARC Performance

“…Photosensitive DBARCs have photoimageable properties and resolve patterns irrespective of upper resist layer [9][10][11][12][13][14][15][16][17][18]. Therefore, they have better resolution and through-pitch performance which are required for logic devices and critical layers.…”