Improving the Temperature Stability of MEMS Gyroscope Bias with on-chip Stress Sensors

Erkan, Derin; Tatar, Erdinc

doi:10.1109/inertial60399.2024.10502041

2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) 2024

DOI: 10.1109/inertial60399.2024.10502041

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Improving the Temperature Stability of MEMS Gyroscope Bias with on-chip Stress Sensors

Derin Erkan,

Erdinc Tatar

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Improving the Temperature Stability of MEMS Gyroscope Bias with on-chip Stress Sensors

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References 9 publications

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