Journal of Crystal Growth
 2011
DOI: 10.1016/j.jcrysgro.2010.08.061
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In situ CBrCl3 etching to control size and density of InAs/GaAs quantum dots

Akira Koizumi
1
,
Hiroshi Imanishi
2
,
Kazuo Uchida
3
et al.
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