In situ chip-based heating studies of metal-induced layer exchange and Si crystallization using STEM, LEND and SE imaging in SEM

Parallel Acquisition of Real and Reciprocal Space Data in Transmission SEM

“…In this work, we want to demonstrate the successful implementation of our presented setup by means of several examples. Furthermore, it is intended to combine the described setup with our in situ heating stage [6] to perform unique in situ heating experiments together with acquiring all available signals simultaneously (see Figure 2b). The heating stage utilizes DENSsolutions Wildfire Nano-Chips, which enables precise and fast heating and cooling of the specimen.…”

“…The heating stage utilizes DENSsolutions Wildfire Nano-Chips, which enables precise and fast heating and cooling of the specimen. The parallel access to real and reciprocal space during annealing experiments can help to unravel the complex interplay of phenomena during thin film processes, like, e.g., grain coarsening, dewetting and texture evolution during solid-state dewetting of metal films [6,7].…”