In-Situ Temperature Monitoring and Deposition Induced Errors Calibration in Metal-Organic Chemical Vapor Deposition

Yan, Dong; Lee, Shing Man; Ye, Longmao; Wang, Linzi; Liu, Jianpeng; Sun, Yuming

doi:10.1109/imccc.2013.199

Cited by 2 publications

(3 citation statements)

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“…Consequently, emissivity-compensated pyrometry, which combines reflectometry and pyrometry, is a suitable in situ temperature probe. [7][8][9][10][11][12][13][14] Various calibration methods have been used to correct reactor-to-reactor temperature variations caused by optical adjustments of the probe, viewport geometry, and other equipment parameters.…”

Section: Downloaded By [Texas a And M International University] At 04:3mentioning

confidence: 99%

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Novel temperature calibration for epitaxial growth characterization

Yan

Lee

Wang

et al. 2015

Instrumentation Science & Technology

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A multi-probe in situ temperature monitoring system with a closed-loop process control has been developed using the technique of emissivity-compensated pyrometry for semiconductor epitaxial growth via metal-organic chemical vapor deposition. A standalone temperature calibration unit was designed to correct for reactor-to-reactor temperature variations. After calibration, a probe-to-probe temperature mismatch of less than ± 0.13 °C was obtained. Moreover, a temperature offset induced by the inevitable viewport deposition over time was demonstrated. A 4.28 °C temperature bias was successfully double-calibrated by introducing a compensation factor into the radiation equations, which was then validated during twelve processing runs of light emitting diode epitaxial growth.

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Section: Downloaded By [Texas a And M International University] At 04:3mentioning

confidence: 99%

“…show uncorrected temperatures, while the red solid circles represent measurements corrected by equation (13). The error bars were estimated from the standard deviation of multiple measurements on ten wafers on the outer ring of the susceptor.…”

Section: Errors During Epitaxial Growthmentioning

confidence: 99%

Novel temperature calibration for epitaxial growth characterization

Yan

Lee

Wang

et al. 2015

Instrumentation Science & Technology

Self Cite

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“…A fine-grained temperature monitoring system for sustainable geothermal drill holes examined by Cozzini demonstrated an installation of an accurate and stable temperature monitoring system in a geothermal drill hole [7]. Temperature monitoring and temperature deposition induced calibration of errors in chemical-organic chemical vapor deposition carried out by Yan showed that in the process of semiconductor coating growth by metal-organic chemical vapor deposition (MOCVD), temperature measurement errors occurred due to deposition at the reactor display port [8]. Ali accomplished on accessing on-chip temperature health monitors using the IEEE 1687 standard using three temperature monitors together with an IJTAG controller online temperature measurements using the IJTAG network interface [9].…”

Section: Introductionmentioning

confidence: 99%

Monitoring the Environmental Temperature of the Arduino Assistance Engineering Faculty Using Telegram

Hariyanto

Hendrawan

Ritzkal

2020

jrc

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The temperature of the air is the state of hot air caused by the heat of the sun. Factors that affect the amount of solar heat received by the earth are cloud, the surface plane, the angle of the sun, and the length of the sun's exposure. The heat of the earth's surface by solar radiation affects the heat of the air. Earth's surface air temperature varies because sunlight spreads unevenly on the earth's surface. The research aimed to design and implement a series of tools that can measure the ambient temperature and provide information about the environmental temperature via telegram. The methods used in this research were analyses consisting of needs analysis, and analysis of how it worked. Hardware and software implementations were also applied. The research carried out several tests, including tests on the DHT11 sensor, LED light, LCD i2c, Ethernet Shield, and Telegram test. The integration test on the LCD showed that when the temperature was below or the same as 25˚C, the green LED would be ON and the red LED OFF, which indicated that it was cold temperature. Conversely, when the temperature was the same or above 30˚C, the red LED would be ON, and the green LED OFF, indicating that the temperature was hot. The second test was to compare digital and analog sensors. The comparison values of the digital and analog temperatures were 1.1˚C, and the humidity was 23.1% RH. The highest temperature obtained from the system per day was 34˚C, and the lowest temperature was 23˚C.

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In-Situ Temperature Monitoring and Deposition Induced Errors Calibration in Metal-Organic Chemical Vapor Deposition

Cited by 2 publications

References 10 publications

Novel temperature calibration for epitaxial growth characterization

Novel temperature calibration for epitaxial growth characterization

Monitoring the Environmental Temperature of the Arduino Assistance Engineering Faculty Using Telegram

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