Increasing the sensitivity for tilt measurement using a cyclic interferometer with multiple reflections

Kumar, V. C. Pretheesh; Joenathan, C.; Ganesan, A. R.; Somasundram, Umapathy

doi:10.1117/1.oe.55.8.084103

Cited by 4 publications

(2 citation statements)

References 14 publications

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“…Pisani replaced one of the mirrors of a Michelson interferometer with a pair of mirrors enclosing a small angle in which multiple reflections take place and demonstrated picometer sensitivity for displacement measurement [11]. Using similar kind of arrangement for multiple reflections, Joenathan et al demonstrated nano-radian angle sensitivity using cyclic interferometer [12,13] and picometer sensitivity in dual-arm multiple-reflection Michelson interferometer [14].…”

Section: Multi-pass Interferometrymentioning

confidence: 99%

Multi-pass, multi-beam and multi-wavelength optical interferometries

Sirohi¹

2019

AJP

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This article is dedicated to Prof Kehar Singh for his significant contributions to Optics and Photonics Optical interferometry is perhaps the oldest precision measurement technique that has evolved in its various variants due to the developments in optical sources and detector systems, and varied applications. Some of the variants are developed to enhance the accuracy of measurement and also the ease of measurement. This paper discusses the theory of multi-pass, multi-beam and multi-wavelength interferometries.

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Section: Multi-pass Interferometrymentioning

confidence: 99%

Multi-pass, multi-beam and multi-wavelength optical interferometries

Sirohi¹

2019

AJP

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“…Various angular measurement methods have been proposed, such as autocollimator [14,15], interferometer [16,17], visual measurement [18,19], and one composed of both the interferometer and autocollimator methods [20]. Among these methods, autocollimators are adopted more often due to their smaller, compact size and lower condition requirements compared with those of the other methods.…”

Section: Introductionmentioning

confidence: 99%

Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction

Fan

Jiang

et al. 2019

Sensors

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Scanning mirrors appear to be key components in optoelectronic systems for line-of-sight (LOS) stabilization. For improving the angular accuracy of a scanning mirror based on the eddy current displacement sensor measurement, an angular error-correction method is proposed and demonstrated. A mathematic angular error model with physical parameters was developed, and the cross-validation method was employed to determine the reasonable order of the Maclaurin series used in the error model, which increased the exactitude and robustness of the correction method. The error parameters were identified by accurately fitting the calibrated angular errors with the error model, which showed excellent error prediction performance. Based on the angular calculation model corrected by the error model, the closed-loop control system was established to obtain accurate deflection angles. Experimental results show that within the deflection angle of ±1.5 deg, the angular accuracy was improved from 0.28 deg to less than 1.1 arcsec, and the standard deviation for six measurements was less than 1.2 arcsec, which indicates that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors.

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Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer

Kumar

Ganesan

2019

Optics & Laser Technology

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Increasing the sensitivity for tilt measurement using a cyclic interferometer with multiple reflections

Cited by 4 publications

References 14 publications

Multi-pass, multi-beam and multi-wavelength optical interferometries

Multi-pass, multi-beam and multi-wavelength optical interferometries

Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction

Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer

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