Inductively coupled plasma dry etching for nano structured III-V on Si lasers

Tandukar, Sushil; Chung, Il-Sug

doi:10.1109/oecc.2018.8730039

2018 23rd Opto-Electronics and Communications Conference (OECC) 2018

DOI: 10.1109/oecc.2018.8730039

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Inductively coupled plasma dry etching for nano structured III-V on Si lasers

Sushil Tandukar

Il-Sug Chung

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Inductively coupled plasma dry etching for nano structured III-V on Si lasers

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