1997
DOI: 10.1021/jp970767m
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Inelastic Scattering Dynamics of Hyperthermal Fluorine Atoms on a Fluorinated Silicon Surface

Abstract: The interaction of energetic fluorine atoms with a fluorinated silicon surface has been studied by monitoring energy and angular distributions of scattered fluorine atoms. Two beams with average translational energies of 284 and 544 kJ/mol were directed onto the SiF x layer, known to exist during steady-state etching. While thermal scattering of unreacted fluorine atoms is observed, nonthermal scattering dominates and includes both single- and multiple-bounce collisions at the complex surface. Multiple-bounce… Show more

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Cited by 43 publications
(72 citation statements)
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“…This kind of decomposition of the effusive beam according to the initial energy range of N atoms had already been performed in previous works for the experimental scattering of F atoms on a fluorinated Si surface where two distinct scattering processes had also been suggested: 58,59 (i) multiple bounce/indirect scattering giving a cosine distribution that corresponds to our lower E T i and (ii) single bounce/direct scattering resulting in a broad specular distribution that corresponds to our higher E T i . However, note that, in our case, we can not discriminate between the two scattering processes by using the number of rebounds, since it remains quite low at any E T i .…”
Section: Angular Distributionmentioning
confidence: 95%
“…This kind of decomposition of the effusive beam according to the initial energy range of N atoms had already been performed in previous works for the experimental scattering of F atoms on a fluorinated Si surface where two distinct scattering processes had also been suggested: 58,59 (i) multiple bounce/indirect scattering giving a cosine distribution that corresponds to our lower E T i and (ii) single bounce/direct scattering resulting in a broad specular distribution that corresponds to our higher E T i . However, note that, in our case, we can not discriminate between the two scattering processes by using the number of rebounds, since it remains quite low at any E T i .…”
Section: Angular Distributionmentioning
confidence: 95%
“…Translational energy distributions, P (E T ), were derived from the TOF distributions using a simple density-to-flux conversion that assumes a monoenergetic incident beam. 25,28,29 The P (E T ) distributions are proportional to flux and were integrated to yield the relative flux of the scattered products. The integrated flux of a specific product species as a function of final angle for a given incidence angle yielded a flux angular distribution for that species.…”
Section: Molecular Beam Experimentsmentioning
confidence: 99%
“…In this work we utilize an atmospheric plasma arc to produce a nitrogen beam that contains a mixture of N-atoms and N 2 molecules. Other methods to make fast beams are laser detonation or charge exchange [11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…In this work we utilize an atmospheric plasma arc to produce a nitrogen beam that contains a mixture of N-atoms and N 2 molecules. Other methods to make fast beams are laser detonation or charge exchange [11][12][13].The interaction of N-atoms with surfaces is interesting because nitrides are very stable surfaces with desirable properties. This is due to the very high binding energy of the Natoms to metal surfaces resulting in stable compounds, for instance for use in silicon or fusion technology, see e.g.…”
mentioning
confidence: 99%