Influence of B- and N-doping levels on the quality and morphology of CVD diamond

Eccles, A. J.; Steele, Timothy A.; Afzal, A; Rego, C.A.; Ahmed, Waqar; May, Paul; Leeds, SM

doi:10.1016/s0040-6090(98)01667-8

Cited by 25 publications

(9 citation statements)

References 9 publications

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“…It should be recalled that the main consequence of nitrogen or boron incorporation is to change the morphology and defect content of the films 23, 24, which are responsible for the thermally stimulated luminescence (TL), current (TSC), and exoelectronic emission (TSEE) associated with defect formation during growing and localized levels within the gap 25, 26. The presence of structural defects and compositional impurities, which, of course, depend on the growth conditions, strongly affects the charge transport, collection efficiency and trapping population, and causes evident effects on the TL glow curve.…”

Section: Resultsmentioning

confidence: 99%

Thermoluminescence assessment of 0.5, 1.0 and 4.0 µm thick HFCVD undoped diamond films

Meléndrez

Chernov

May

et al. 2009

Physica Status Solidi (a)

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Chemical vapor deposition (CVD) diamond has not found extensive application as a thermoluminescence (TL) dosimeter, mainly because its TL glow curve shape is not reproducible. A slight variation in the growing conditions may result in strong changes in the morphology, microstructure, and surfaceimpurity-related defects, considerably affecting the TL glow curve features. In order to study the main TL characteristics under controlled growing conditions, we present results on three 0.5, 1.0, and 4.0 m thick hot filament CVD (HFCVD) diamond films grown on Si (100) substrates. The recorded TL glow curves were resolved into individual peaks by a home-made deconvolution program and the kinetic parameters of the peaks were extracted. The best fits of the TL glow curves were obtained using four peaks, except for the 4.0 m thick sample that required five TL components. All samples showed three high intensity TL peaks between 180-400 • C and a less intense one or two peaks in the 100-180 • C low-temperature region. The lowtemperature components all obey second-order kinetics while the high-temperature ones obey first and 1.6 order kinetics. The samples showed similar TL peaks with comparable kinetics parameters. It is concluded that the manufacturing of high quality HFCVD diamond may require a further improvement in the growing process in order to exploit its excellent tissueequivalence properties in clinical and medical applications.

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Section: Resultsmentioning

confidence: 99%

Thermoluminescence assessment of 0.5, 1.0 and 4.0 µm thick HFCVD undoped diamond films

Meléndrez

Chernov

May

et al. 2009

Physica Status Solidi (a)

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“…It has been also reported that small amounts of nitrogen are able to stabilize the v100w texture of the growing film. 77 The remarkable difference between the reactivity of C-and N-containing species at the growing diamond surface has been further emphasized by Eccles et al 78 who reported on the doping efficiencies of both boron and nitrogen. While a doping efficiency close to unity was found for the former, an upper estimate of as low as 10 23 was made for the latter.…”

Section: ''Hot Filament'' Cvdmentioning

confidence: 99%

Synthesis of diamond

Ferro

2002

J. Mater. Chem.

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Diamond is impressive because of its wide range of extreme properties. By most measures, diamond is 'the biggest and best': it is the hardest known material, has the lowest coefficient of thermal expansion, is chemically inert and wear resistant, offers low friction, has high thermal conductivity, and is electrically insulating and optically transparent from the ultraviolet to the far infrared. Diamond already finds use in many different applications including, of course, its use as a precious gem, but also as a heat sink, as an abrasive, and as inserts and/or wear-resistant coatings for cutting tools. Obviously, it is possible to envisage many other potential applications for diamond as an engineering material, but progress in implementing many such ideas has been hampered by the comparative scarcity of natural diamond. This paper reports on the progress of the long running quest for ways to synthesize diamond in the laboratory

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“…p-type diamond, since almost all added nitrogen remains Consistent with this view, the m/e=28 signal is found as gas-phase N 2 . Diamond films grown using this gas at power levels where the NH 3 and CH 4 signals are mixture with N 2 concentrations of 0-4.7% were examfalling, yet where the HCN mole fraction is rising, as ined for incorporated nitrogen by the technique of would be expected for an intermediate in the conversion secondary ion mass spectrometry (SIMS ) [16 ]. In of CH 4 and NH 3 to HCN.…”

Section: Introductionmentioning

confidence: 99%

Chemical vapour deposition

2021

Nat Rev Methods Primers

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In-situ molecular beam mass spectrometry has been used to study the effects of nitrogen-containing gases on the gas-phase composition during microwave plasma chemical vapour deposition (CVD) of diamond. The molecular beam mass spectrometer used in this work extracts gas directly from the plasma bulk via a small sampling orifice inserted into the side of the plasma. The plasma composition was examined for a variety of nitrogen-containing gases added to a standard 1% C:H 2 feedstock. Nitrogen was added to this mixture at a carbon-to-nitrogen ratio, C:NN1:1, in one of the following forms: N 2 , NH 3 , CH 3 NH 2 , or HCN. For N 2 and NH 3 , the carbon source was CH 4 , whereas CH 3 NH 2 and HCN required no added carbon. Mass spectrometer signals from hydrocarbons, nitrogen-containing species, and the methyl radical were recorded. These were calibrated to give absolute mole fractions of the main carbon-and nitrogen-containing species present at detectable levels. The content of N 2 and NH 3 in the feed was also varied while holding the CH 4 content at 1%. Results are compared with those found during hot-filament CVD. The relevance of the measured abundance of various nitrogen-containing species in the plasma to attempts to create p-type diamond is discussed.

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Influence of B- and N-doping levels on the quality and morphology of CVD diamond

Cited by 25 publications

References 9 publications

Thermoluminescence assessment of 0.5, 1.0 and 4.0 µm thick HFCVD undoped diamond films

Thermoluminescence assessment of 0.5, 1.0 and 4.0 µm thick HFCVD undoped diamond films

Synthesis of diamond

Chemical vapour deposition

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