J Appl Mech Tech Phy
 2023
DOI: 10.1134/s0021894423050061
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Influence of Current Density on the Structure of Amorphous Silicon Suboxide Thin Films Under Electron-Beam Annealing

E. A. Baranov,
V. A. Nepomnyashchikh,
V. O. Konstantinov
et al.
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