Influence of Hf doping on interfacial layers of Ta2O5 stacks studied by ellipsometry

Microstructure, optical and electrical properties of solution-derived peroxo-zirconium oxide gate dielectrics for CMOS application

“…Through SE, the angles ψ and Δ were obtained. These two parameters which are measured as functions of the wavelength from the given samples are related to the optical and structural properties of the samples through the following expression [25]:…”