2022
DOI: 10.2320/matertrans.mt-ma2022014
|View full text |Cite
|
Sign up to set email alerts
|

Influence of Iron Diffusion on the Oxidation Resistance of CrSiCN Hard Coatings

Abstract: Radiofrequency (RF) reactive magnetron sputtering was used to deposit thin SiCN and CrSiCN films on high-speed steel or silicon substrates. Nanoindentation, scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM-EDS), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS) analyses were used to investigate the changes in the mechanical properties and microstructure of the CrSiCN films after annealing. The CrSiCN (37.6%Cr) film deposited on the Si substrate showed litt… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2024
2024
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
references
References 20 publications
0
0
0
Order By: Relevance