This study shows the electrical conductivity-dependent
gas sensing
characteristics of spray-deposited rare earth (RE) metal ion (Sm
3+
, Ce
3+
, Pr
3+
, La
3+
)-doped
cadmium oxide (CdO) thin films on soda-lime microscope glass substrates
at 300 °C. We examined the deposited films’ structural,
surface microstructural, DC electrical, and gas sensing features.
The X-ray diffraction study indicates that all samples were polycrystalline,
with the favored growth direction shifting from the (111) plane to
the (200) plane. The highest root-mean-square values were obtained
for the Pr-doped CdO thin film (5.86 nm). The surface microstructure
of CdO thin films was significantly influenced by the RE metal ion
dopant, with typical grain size values ranging from 64 nm to 134 nm
depending on the dopant. The carrier concentration and resistivity
of CdO films vary based on the RE metal ions used as dopants. Low
resistivity (3.01 × 10
–4
Ω.cm) was achieved
for the CdO thin film doped with La. High gas sensitivity (71.42%)
was achieved for CdO thin films doped with La. The donor dopant regulated
the electrical conductivity and gas sensing capabilities of CdO thin
films.