Influence of N2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

Ding, Wanyu; Xu, Jun; Lu, Wen‐Zhong; Deng, Xianmo; Chen, Dong

doi:10.1016/j.tsf.2009.07.191

Thin Solid Films

2010

DOI: 10.1016/j.tsf.2009.07.191

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Influence of N2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

Wanyu Ding¹,

Jun Xu²,

Wen‐Zhong Lu³

et al.

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Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations

et al. 2023

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Influence of N2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

Cited by 5 publications

References 21 publications

Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations

Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations

The influence of N ion bombardment on the properties of PET surface and SiNx/PET complex

Composition and crystal structure of N doped TiO2 film deposited at different O2 flow rate by direct current sputtering

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