2019
DOI: 10.1080/01694243.2019.1639885
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Influence of power frequency on the performance of SiC thin films deposited by pulsed DC magnetron sputtering

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Cited by 8 publications
(1 citation statement)
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“…For physical vapour deposition (PVD), several solid ingots are needed as targets [6,7]. These solid ingots are often prepared by hot press sintering or spark plasma sintering, thus generating large consumption.…”
Section: Introductionmentioning
confidence: 99%
“…For physical vapour deposition (PVD), several solid ingots are needed as targets [6,7]. These solid ingots are often prepared by hot press sintering or spark plasma sintering, thus generating large consumption.…”
Section: Introductionmentioning
confidence: 99%