Influence of Preliminary Plasma Processing on Luminescent Properties of Porous Silicon

Abstract

Measurements of radiative properties of porous silicon after compression plasma treatment have been carried out. Significant increase of photoluminescence intensity and blue shift of spectra have been observed on studied samples in comparison with porous layers formed on monocrystalline silicon without preliminary plasma treatment. An influence of long storage of plasma modified porous silicon layer on the intensity and spectral composition of photoluminescence has been checked. A rise of PL intensity during first moth of storage and following decrease of PL intensity in the next three months has been observed. Mechanisms of changes in a spectral composition of PL and alterations of PL intensity during storage have been discussed.