Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering

RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization

“…There is uniform mixing of precursors and the reactivity of precursors is enhanced, resulting in dense and uniform coatings. Utilization of sputtering deposition techniques in enhancing the packing density has been demonstrated earlier [26]. RF PECVD is one such technique which combines the advantages of CVD and sputtering technique.…”

“…Increased moisture absorption in film B can be due to its columnar structure. Columnar structure reduces the packing density resulting in decrease of refractive index [26] and increase in roughness. This corroborates with the ellipsometry and AFM results of film B.…”

Synthesis of sulfated Y-doped zirconia particles and effect on properties of polysulfone membranes for treatment of wastewater containing oil

“…Besides, it is reported from the work of Boulouz that proper addition of Y 2 O 3 can stabilize tetragonal structure of ZrO 2 which has a higher chemical reaction activity 0304-3894/$ -see front matter © 2011 Elsevier B.V. All rights reserved. doi:10.1016/j.jhazmat.2011.05.058 at room temperature [18]. Moreover, it is well known that the interaction between sulfated oxides and metals leads to the formation of materials with greater acidity and surface areas than that one of non-sulfated oxides [19].…”

Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films

“…In the past decades, a large variety of papers have been devoted to the preparation and properties of the zirconia films and multilayers [1][2][3][4][5]. As pure ZrO 2 material, it exists in the monoclinic, tetragonal, and cubic structures.…”