Influence of Technological Parameters during Multiwire Cutting of GaAs Ingots on the Surface Characteristics of the Plates

Podgorny, D. A.; Nestyurkin, M. S.; Komarovskiy, N. Yu.

doi:10.1134/s1063739723080097

Russ Microelectron

2023

DOI: 10.1134/s1063739723080097

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Influence of Technological Parameters during Multiwire Cutting of GaAs Ingots on the Surface Characteristics of the Plates

D. A. Podgorny,

M. S. Nestyurkin,

N. Yu. Komarovskiy

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Influence of Technological Parameters during Multiwire Cutting of GaAs Ingots on the Surface Characteristics of the Plates

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References 12 publications

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