Influence of the Design Features of a Magnetron Sputtering Deposition System on the Electrical and Optical Properties of Indium—Tin Oxide Films

Кудряшов, Д.А.; Maksimova, A. A.; Vyacheslavova, Ekaterina; Uvarov, A. V.; Морозов, И. А.; Baranov, Artem; Monastyrenko, A. O.; Gudovskikh, A. S.

doi:10.1134/s1063782621040072

Semiconductors

2021

DOI: 10.1134/s1063782621040072

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Influence of the Design Features of a Magnetron Sputtering Deposition System on the Electrical and Optical Properties of Indium—Tin Oxide Films

Д.А. Кудряшов

A. A. Maksimova

Ekaterina Vyacheslavova

et al.

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“…It is known that for different designs of magnetron sputtering plants, the optimal growth modes of ITO differ [8]. For this installation, the optimal growth mode at room temperature [9] was determined.…”

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confidence: 99%

Influence of the conditions for the formation of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--SnO-=SUB=-2-=/SUB=- films by magnetron sputtering on the charge carriers lifetime in silicon

Kudryashov

Gudovskikh

Maksimova

et al. 2022

Technical Physics Letters

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The critical influence of the indium-tin oxide films formation rate on the degradation degree of the a-Si : H/c-Si interface during magnetron sputtering is shown. It was found that when the distance between the magnetron and the sample is 10 cm, the lifetime decreases from ~ 2 ms to 10 μs, while when this distance is reduced to 7 cm, due to a two-times decrease in the deposition time, a decrease is observed from 1.5 ms to 450 μs. Keywords: silicon, plasma-enhance deposition, thin films, passivation, ITO, solar cells.

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mentioning

confidence: 99%

Influence of the conditions for the formation of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--SnO-=SUB=-2-=/SUB=- films by magnetron sputtering on the charge carriers lifetime in silicon

Kudryashov

Gudovskikh

Maksimova

et al. 2022

Technical Physics Letters

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show abstract

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Influence of the Design Features of a Magnetron Sputtering Deposition System on the Electrical and Optical Properties of Indium—Tin Oxide Films

Cited by 1 publication

References 14 publications

Influence of the conditions for the formation of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--SnO-=SUB=-2-=/SUB=- films by magnetron sputtering on the charge carriers lifetime in silicon

Influence of the conditions for the formation of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--SnO-=SUB=-2-=/SUB=- films by magnetron sputtering on the charge carriers lifetime in silicon

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