Influence of the Oxygen Partial Pressure on the Photo-Curing of Photo-Oxidation Induced Polycondensation Resin.

Abstract

The unique properties of the photo-oxidation induced polycondensation resin (POP resin) were experimentally investigated using 'H NMR analysis, photolithogmphic evaluation and photo-DSC analysis. While a conventional photo-racial polymerization (PRP) type resin showed the phenomenon of reciprocity law failure at low intensity imadiation and decreasing thickness of the developed film iv ith increased oxygen partial pressure, oxygen was found to improve the sensitivity of the POP resin Post-exposure baking (PEB) also enhanced the curing of the POP resin. The 'H NMR study indicated that the precursor at the crosslinking point is relatively stable at room tempemture. The effectiveness of C~, added to the POP resin was discussed on the basis of the photo-DSC analysis.