15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
 1999
DOI: 10.1117/12.346229
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Initial results from a Leica ZBA31H+shaped E-beam mask writer located at the Photronics Advanced Mask Shop in Manchester, England

Stephen R. Johnson
1
,
Paul Marshall
2
,
Peter Osborne
3
et al.
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