“…As the pressure increases from 1.4 to 2.9ϫ10 Ϫ4 Torr, the mean-free path for charge-exchange collision is estimated to decrease from about 28 to 13.5 cm. 15 This indicates that at higher pressure, there are more collisions at the near side to the source than at far side, i.e., the generation of the lower-energy neutrals is larger at higher pressure. Moreover, elastic scattering and second chargeexchange collisions are apt to occur at the higher pressure and they also produce lower-energy neutrals.…”