Abstract:Abstract²Breath is one of vital functions for human. Development of an effective breath sensor to detect apnea is important issue in medical care. A new technology with integration of CMOS circuits and nano electromechanical system (NEMS) as breath sensor has been presented. Through a specifically treated procedure, multi-walled carbon nanotubes (MWCNTs) were immobilized on a silicon wafer. Techniques by photolithography and sputtering were then implemented on the MWCNT film to develop micro interdigitated ele… Show more
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