Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

Ryzhkov, Vitaly V.; Echeistov, Vladimir V.; Zverev, Aleksandr V.; Baklykov, Dmitry A.; Konstantinova, Tatyana; Lotkov, Evgeny S.; Ryazantcev, Pavel G.; Sh. Alibekov, Ruslan; Kuguk, Aleksey K.; Aleksandrov, Andrey R.; Krasko, Elisey S.; Barbasheva, Anastasiya A.; Ryzhikov, Ilya A.; Rodionov, Ilya A.

doi:10.1039/d3lc00061c

Cited by 3 publications

References 33 publications

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Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Schall,

Ebbinghaus,

Strelow

et al. 2023

Adv Materials Inter

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The study describes synthesis and characterization of > 10 µm thick multicrystalline (mc), highly oriented, p‐doped silicon layers by aluminothermic reduction of low‐cost soda‐lime glass. X‐ray diffraction shows a highly preferred (111)‐orientation and excellent crystallinity. Low compressive stress and very good crystallinity are confirmed by the peak position and width of the Raman LO‐phonon line, approaching the one of bulk single‐crystalline wafer material. Due to strong bonding to the glass substrate layer, spalling is not observed. A conductive aluminum‐rich oxide layer is formed underneath the silicon, serving as an electrical back‐contact for electronic devices. Using secondary ion mass spectrometry very low concentrations of 1014–1015 cm−3 of impurities are found originating from the soda‐lime glass with an iron content below the detection limit. Furthermore, a plateau‐like, very homogenous Al concentration of ≈4 × 1018 cm−3 over a thickness of ≈10 µm is found, which corresponds to the solubility of Al in Si at the process temperature. Complete electronic activation within the plateau region is confirmed by carrier concentration measurements using electrochemical capacitance–voltage profiling and Raman spectroscopy. Hole concentrations in the range of few 1018 cm−3 are beneficial for the p‐type base material of full‐emitter cell mc‐silicon photovoltaic devices.

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Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Schall,

Ebbinghaus,

Strelow

et al. 2023

Adv Materials Inter

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Silicon Nitride Integrated Photonics from Visible to Mid‐Infrared Spectra

Buzaverov,

Baburin,

Sergeev

et al. 2024

Laser & Photonics Reviews

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Silicon nitride (Si3N4) photonic integrated circuits (PICs) are of great interest due to their extremely low propagation loss and higher integration capabilities. The number of applications based on the silicon nitride integrated photonics platform continues to grow, including the Internet of Things (IoT), artificial intelligence (AI), light detection and ranging (LiDAR), hybrid neuromorphic and quantum computing. It's potential for CMOS compatibility, as well as advances in heterogeneous integration with silicon‐on‐insulator, indium phosphate, and lithium niobate on insulator platforms, are leading to an advanced hybrid large‐scale PICs. Here, they review key trends in Si3N4 photonic integrated circuit technology and fill an information gap in the field of state‐of‐the‐art devices operating from the visible to the mid‐infrared spectrum. A comprehensive overview of its microfabrication process details (deposition, lithography, etching, etc.) is introduced. Finally, the limitations and challenges of silicon nitride photonics performance are pointed out in an ultra‐wideband, providing routes and prospects for its future scaling and optimization.

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Investigation of Factors, Affecting the Behaviour of I_d–V_g Shift in MOSFET

Chukhraev,

Drach

2024

2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)

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Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

Abstract: Lab-on-a-chip (LOC) forms the basis of the new-generation portable analytical systems. LOC allows the manipulation of ultralow flows of liquid reagents and multistep reactions on a microfluidic chip, which requires...

Cited by 3 publications

References 33 publications

Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Silicon Nitride Integrated Photonics from Visible to Mid‐Infrared Spectra

Investigation of Factors, Affecting the Behaviour of I_d–V_g Shift in MOSFET

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Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

Abstract: Lab-on-a-chip (LOC) forms the basis of the new-generation portable analytical systems. LOC allows the manipulation of ultralow flows of liquid reagents and multistep reactions on a microfluidic chip, which requires...

Cited by 3 publications

References 33 publications

Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Multicrystalline, Highly Oriented Thick‐Film Silicon from Reduction of Soda‐Lime Glass

Silicon Nitride Integrated Photonics from Visible to Mid‐Infrared Spectra

Investigation of Factors, Affecting the Behaviour of Id–Vg Shift in MOSFET

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Product

Resources

About

Investigation of Factors, Affecting the Behaviour of I_d–V_g Shift in MOSFET