Integrated Optics: Platforms and Fabrication Methods

Abstract

Integrated optics is a field of study and technology that focuses on the design, fabrication, and application of optical devices and systems using integrated circuit technology. It involves the integration of various optical components, such as waveguides, couplers, modulators, detectors, and lasers, into a single substrate. One of the key advantages of integrated optics is its compatibility with electronic integrated circuits. This compatibility enables seamless integration of optical and electronic functionalities onto the same chip, allowing efficient data transfer between optical and electronic domains. This synergy is crucial for applications such as optical interconnects in high-speed communication systems, optical sensing interfaces, and optoelectronic integrated circuits. This entry presents a brief study on some of the widely used and commercially available optical platforms and fabrication methods that can be used to create photonic integrated circuits.

Dielectric Waveguide-Based Sensors with Enhanced Evanescent Field: Unveiling the Dynamic Interaction with the Ambient Medium for Biosensing and Gas-Sensing Applications—A Review

“…Silicon-on-insulator (SOI), silicon nitride (Si 3 N 4 ), and polymer materials are three distinct platforms that play crucial roles in the realm of photonic sensors, each offering unique advantages and tailored properties to meet specific sensing requirements [20,[53][54][55][56][57]. SOI platforms are characterized by their high refractive index contrast between the silicon WG and the surrounding insulator layer, allowing for efficient light confinement [58].…”

“…However, these sensors also come with certain disadvantages. Fabrication processes can be complex and expensive, limiting their accessibility to some researchers and industries [20]. Furthermore, their performance may be susceptible to environmental factors such as temperature fluctuations and mechanical vibrations, requiring additional measures for robustness and reliability.…”

Small Footprint and High Extinction Ratio Cladding-Modulated Bragg Grating Structure as a Wideband Bandstop Filter

“…The fabrication of the cladding-modulated BG waveguide involves a two-step process. Initially, an SOI wafer is spin-coated with a photoresist or electron beam resist, and a deep ultraviolet (DUV) photolithography or electron beam lithography (EBL) process can be employed to transfer a waveguide pattern onto the resist [29]. Removing an exposed resist via developer is a crucial step in the photolithography process, playing a pivotal role in defining patterns on a substrate.…”

Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing

“…CMOS is a semiconductor technology commonly used in electronic devices and integrated circuits and is crucial for Si photonics, enabling the integration of photonic and electronic elements on a single Si chip. CMOS technology is widely adopted for its energy efficiency, scalability, and versatility, making it a fundamental component in the design and manufacture of modern electronics [ 16 ]. Photolithography, using optical or extreme ultraviolet (EUV) light, transfers patterns onto a Si wafer coated with photosensitive material.…”

“…The choice of platform depends on factors such as performance requirements, cost considerations, and the specific needs of the application at hand. For more detailed information on optical platforms and fabrication methods, we recommend readers to see [ 16 ].…”