Integrating enhanced hotspot library into manufacturing OPC correction flow

Falch, Bradley J.; Wu, Linghui; Tsai, Jia-Huei; Tan, Elsley; Fu, Jiunhau; Huang, Tengyen; Liao, Chun-Cheng

doi:10.1117/12.2552110

Design-Process-Technology Co-Optimization for Manufacturability XIV 2020

DOI: 10.1117/12.2552110

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Integrating enhanced hotspot library into manufacturing OPC correction flow

Bradley J. Falch

Linghui Wu

Jia-Huei Tsai³

et al.

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Integrating enhanced hotspot library into manufacturing OPC correction flow

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