Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell

Rengarajan, R.; Malik, R.; Yang, H.S.; Yan, Wendy; Ramachandran, R.; He, Bo; Divakaruni, R.; Li, Yujun

doi:10.1109/vlsit.2002.1015387

2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303)

DOI: 10.1109/vlsit.2002.1015387

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Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell

R. Rengarajan¹,

R. Malik²,

H.S. Yang

et al.

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Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell

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