Interdigital transducer generated surface acoustic waves suitable for powder transport

Saiki, Takanao; Tsubosaka, Akio; Yamaguchi, Akinobu; Suzuki, Michitaka; Utsumi, Yuichi

doi:10.1016/j.apt.2016.11.006

Cited by 7 publications

(10 citation statements)

References 13 publications

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“…The SAW actuator was proven to be suitable for copper powder transport in our previous experiment and was fabricated by a single photolithography process performed with semiconductor technology. (7) Concretely, a 4-inch piezoelectric (127.8° y-rotated x-propagating LiNbO 3 ) wafer was cut to a size of 18 × 78 mm 2 by a dicer (DAD322, Disco Co.). Here, the wafer thickness was 500 ± 30 μm and its surface roughness was 0.3 nm or less.…”

Section: Powder Transport By Saws On Horizontal Surfacementioning

confidence: 99%

“…The copper powder was also used in our past experiment, and we confirmed that it could be transported by SAWs. (7) We selected the other three kinds of powders because their material properties differed from those of the copper powder (which is a conductor and an inorganic material with spherical particles). Concretely, we chose the glass powder as it functions as an insulator, the polyethylene powder because it is an organic material, and the alumina powder because its particles have an angular shape.…”

Section: Powder Transport By Saws On Horizontal Surfacementioning

confidence: 99%

“…An ultrasonic wave device and surface acoustic wave (SAW) actuator for transporting a tiny amount of dry powder have been studied. (4)(5)(6)(7) The ultrasonic wave device consists of two parts, a wave-generating source made of a piezoelectric multilayer and a powder transport path made of an acrylic pipe or a substitute for it. The SAW actuator consists of a single part having both a wave-generating source and a powder transport path because an interdigital transducer (IDT) for generating SAWs is fabricated on a piezoelectric substrate whose surface is used as a transport path.…”

Section: Introductionmentioning

confidence: 99%

“…Note that, in related studies on SAW actuators, liquid flow has been mainly reported, (8)(9)(10)(11)(12)(13)(14) and there are very few reports on the transport of solids. (7,15) Currently, copper powder has been the only powder reported to be transported toward the SAW downstream side. (7) Transport toward this side can be used in a feeder and has a wider range of applications than that toward the SAW upstream side.…”

Section: Introductionmentioning

confidence: 99%

“…(7,15) Currently, copper powder has been the only powder reported to be transported toward the SAW downstream side. (7) Transport toward this side can be used in a feeder and has a wider range of applications than that toward the SAW upstream side. However, in the potential applications, it will be necessary to handle powders made of not only conductors such as copper but also insulators (dielectric materials) such as reagents.…”

Section: Introductionmentioning

confidence: 99%

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Transporting Powder with Surface Acoustic Waves Propagating on Tilted Substrate

Saiki¹,

Takizawa²,

Kaneyoshi³

et al. 2021

Sensors and Materials

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We fabricated a surface acoustic wave (SAW) actuator by patterning an interdigital transducer (IDT) made of Al film on a LiNbO 3 substrate and investigated its transport characteristics with powders of spherical copper, spherical glass, spherical polyethylene, and angular alumina particles with sizes of about 100 µm. The IDT had a 2 mm pitch size, 10 mm aperture, and 10 stripline pairs. It was found that the glass, polyethylene, and alumina powders that could not be transported when the actuator was horizontal could be transported by tilting the actuator, i.e., the powder transport path. It was also found that the powder movement response times with SAWs were shorter than 50 ms when the actuator, tilted at suitable angles of 0°, 6°, 15°, and 26°, transported the copper, glass, polyethylene, and alumina powders, respectively. Then, we fabricated miniature feeders by mounting hoppers on SAW actuators tilted at the above angles and investigated their powder feed characteristics. It was found that, when the feeders were driven for 50 ms at an electric power of 1 W, the fed weights of the copper and glass powders, which did not have flowability problems, were 2.3 and 0.9 mg, respectively.This version has been created for advance publication by formatting the accepted manuscript. Some editorial changes may be made to this version.

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Section: Powder Transport By Saws On Horizontal Surfacementioning

confidence: 99%

Section: Powder Transport By Saws On Horizontal Surfacementioning

confidence: 99%