1996
DOI: 10.1063/1.115588
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Interface of iron metal/aluminum nitride multilayered composite film

Abstract: Several kinds of multilayer films were sputter deposited between iron metal and AlN at room temperature up to a total film thickness of about 1 μm. The formation of iron nitride at the interface was explicitly observed on the film with a single-layer thickness of about 6 nm by He ion yield x-ray absorption spectroscopy and conversation electron Mössbauer spectroscopy. The partial reduction of AlN to aluminum metal at the interface was also observed by x-ray photoelectron spectroscopy depth profile. Metal subst… Show more

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Cited by 14 publications
(4 citation statements)
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“…The standard free energy of formation is either a very small positive or negative value for all iron nitrides, but that of AlN is À 287.0 kJ/mol [3]. We have detected iron nitride formation at the interface of Fe/AlN multilayered thin films prepared by rf-sputter deposition at 30 W contrary to these thermodynamic data [4]. The iron nitride reaction layer was clearly observed by Mössbauer, Fe -K edge XAFS and XPS depth profile spectra [4,5].…”
Section: Introductionmentioning
confidence: 82%
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“…The standard free energy of formation is either a very small positive or negative value for all iron nitrides, but that of AlN is À 287.0 kJ/mol [3]. We have detected iron nitride formation at the interface of Fe/AlN multilayered thin films prepared by rf-sputter deposition at 30 W contrary to these thermodynamic data [4]. The iron nitride reaction layer was clearly observed by Mössbauer, Fe -K edge XAFS and XPS depth profile spectra [4,5].…”
Section: Introductionmentioning
confidence: 82%
“…Experimental details have been described in our previous manuscripts [4,5]. Two sets of multilayered film were fabricated either by rf power of 100 or 30 W, respectively.…”
Section: Methodsmentioning
confidence: 99%
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“…In addition, X-ray photoelectron spectroscopy (XPS) depth profile studies immediately reveal a partial reduction of aluminum nitride to metallic aluminum, paralleled by a significant lattice expansion of the iron in the α (bcc) phase. 1,2) Conventional solid-state chemical arguments are seemingly improper tools to explain the above findings. In fact, thermochemical data for bulk nitrides would definitly rule out the formation of any iron nitride in the presence of aluminum nitride.…”
Section: Introductionmentioning
confidence: 99%