Interfacial layer suppression in ZrO2/TiN stack structured capacitors via atomic layer deposition

Jang, Myoungsu; Jeon, Jihoon; Lim, Weon Cheol; Chae, Keun Hwa; Baek, Seung-Hyub; Kim, Seong Keun

doi:10.1016/j.ceramint.2024.09.137

Ceramics International

2024

DOI: 10.1016/j.ceramint.2024.09.137

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Interfacial layer suppression in ZrO2/TiN stack structured capacitors via atomic layer deposition

Myoungsu Jang,

Jihoon Jeon,

Weon Cheol Lim

et al.

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Interfacial layer suppression in ZrO2/TiN stack structured capacitors via atomic layer deposition

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References 24 publications

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