2022
DOI: 10.1088/1757-899x/1268/1/012009
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Interferometric evaluation of positioning error and position repeatability on CNCs

Abstract: The interferometer is widely used for various applications concerning high precision distance and position measurements, especially for the calibration of numerically controlled machines. While the setup procedures of the interferometer may be provided by the manufacturer, some calibration procedures are well defined by the international standards. Since the operation of interferometers requires qualified personnel, some helpful hints for the novice users are to be presented in this paper. Even if the interfer… Show more

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