2011 IEEE MTT-S International Microwave Symposium 2011
DOI: 10.1109/mwsym.2011.5972960
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Intrinsically switchable, BST-on-silicon composite FBARs

Abstract: This paper presents a DC voltage dependent switchable, composite thin film bulk acoustic wave (FBAR) resonator at 1.82 GHz. The resonator consists of barium stronium titanate-on-silicon in which barium stronium titanate (BST) is primarily used for transduction. The electrostrictive property of BST is exploited to turn the resonator on and off by applying a DC voltage. The device exhibits a quality factor of 157 and 301 at its series and parallel resonance frequencies, respectively. The preliminary result of an… Show more

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Cited by 4 publications
(3 citation statements)
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“…The last investigated way is to use electrostrictive materials directly in the resonator. [34][35] For example AlN exhibits also electrostrictive behaviour. 36 The most important points can be summarised by the following requirements for new materials: tunable materials, low cost fabrication process, frequencies of operation up to few GHz for mass market of telecommunications.…”
Section: Conclusion and Trendsmentioning
confidence: 99%
“…The last investigated way is to use electrostrictive materials directly in the resonator. [34][35] For example AlN exhibits also electrostrictive behaviour. 36 The most important points can be summarised by the following requirements for new materials: tunable materials, low cost fabrication process, frequencies of operation up to few GHz for mass market of telecommunications.…”
Section: Conclusion and Trendsmentioning
confidence: 99%
“…[75][76][77][78][79][80] These resonators have applications as switchable filters in cell phones over surface acoustic wave devices because of their small size, high quality factor, sharp filter skirts, and ease of integration. They can also be used in voltage controlled oscillators with reduced phase noise.…”
Section: Tunable Bulk Acoustic Wave Resonators With Bst Thin Filmsmentioning
confidence: 99%
“…(a) COMSOL simulation results[9] of the split resonance modes due to the acoustic coupling between two FBARs. The left simulation result shows the in-phase resonance mode and the right simulation result shows the out-of-phase resonance mode.…”
mentioning
confidence: 99%