Abstract:The Debye-Wolf electromagnetic diffraction integral is now routinely used to describe focusing by high numerical (NA) lenses. We obtain an eigenfunction expansion of the electric vector field in the focal region in terms of Bessel and generalized prolate spheroidal functions. Our representation has many optimal and desirable properties which offer considerable simplification to the evaluation and analysis of the DebyeWolf integral. It is potentially also useful in implementing two-dimensional apodization techniques to synthesize electromagnetic field distributions in the focal region of a high NA lenses. Our work is applicable to many areas, such as optical microscopy, optical data storage and lithography. 2281-2292 (2003). 11. C. J. R. Sheppard and P. Török, "Efficient calculation of electromagnetic diffraction in optical systems using a multipole expansion," J. Mod. Opt. 44, 803-818 (1997