Investigation on the optical properties of sulfur-doped diamond thin films

Abstract

Sulfur-doped diamond thin films have been synthesized using CH 4 /H 2 /Ar/H 2 S gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The optical properties of the films are investigated by SEM and Raman spectra.The Gaussian line shape is used in the curve fitting for the Raman spectra. Results show that the I D /I G presents the trend of first increase and then decrease with the increase of S/C ratio, however, an upward shift of the diamond peak is observed. This implies residual stress in the sulfur-doped diamond thin films. Moreover, optimum experimental conditions are proposed.