Thin Solid Films
 2023
DOI: 10.1016/j.tsf.2023.139977
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Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering

Clementine Warres
1
,
Jannik C. Meyer
2
,
Tarek Lutz
3
et al.
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