Ion-assisted laser processing of CNx films

Synthesis of superhard carbon nitride composite coatings

“…10,11 Carbon can also be delivered via pulsed laser ablation. [12][13][14] While there have been claims of successful synthesis of crystalline ␤-C 3 N 4 , these claims were largely unsubstantiated, and no modulus/hardness data accompanied these reports. Most authors reported the formation of amorphous carbon nitride films ͑a-CN x ͒, with x typically about 0.3-0.4.…”

X-ray photoelectron spectroscopy studies on the bonding properties of oxygenated amorphous carbon nitride thin films synthesized by pulsed laser deposition at different substrate temperatures

“…Therefore, the ST is important deposition parameters to be optimized in the formation of CN films. Several authors [12][13][14][15][16][17] reported the formation of a-CN x (x: C to N ratio, C:N), with x typically on the order of 0.3-0.4. Yu et al [7] reported the deposited CN films are partially or predominantly composed of the amorphous phase of a-CN x (x < 1) in which small crystallites were embedded in an amorphous matrix, and wherein volume of the crystalline phase accounts for only 5% of the total volume of the deposited films.…”

<title>Influence of additional rf discharge on the properties of carbon nitride thin films deposited by PLD</title>

“…4). 5. Unlike to PE configuration, by using the HC we don't observed the peaks correspond to carbon species, such as C, C and C2.…”

“…The superhard -C3N4 phase of carbon nitride was locally identified only in hybrid laser deposition systems, where additional discharge like microwave and RF discharges were used to produce fragments ofN2 molecules. [2][3][4][5][6].…”