Ion Beam Analysis including ToF-ERDA of complex composition layers

Abstract

When developing new materials for example, for high-temperature nuclear reactors with the potential of hydrogen production, that are characterized by radiation, high temperature and corrosion resistance, it is indispensable the knowledge of their detailed elemental composition and its possible variation with depth from surface. Several analytical methods based on different physical principles are used to determine the depth distribution of elements in the surface layers of materials. For the quantitative determination of elemental depth profile to a depth of several micrometres are applicable established Ion Beam Analysis (IBA) methods such as RBS, EBS, NRA and ERDA. Their advantage is that they are considered to be absolute and to a certain extent non-destructive. Each of these methods is advantageously used to analyse a certain range of elements, sometimes depending on the combination of other elements present. The recently commissioned Time of Flight Elastic Recoil Analysis (ToF-ERDA) measuring system at the Slovak University of Technology MTF in Trnava significantly enhanced the Ion Beam Laboratory capability of a comprehensive elemental analysis of thin films to the depth of hundreds of nanometres. Using the primary analysing 50 MeV Au beam, the depth profiles of all elements from W to H can be obtained within a single measurement. Analysis of complex samples using traditional IBA methods and high-energy ToF-ERDA is discussed and compared. The first measurements on the new ToF-ERDA installation are also presented.