Ion beam deposition

Armour, D.G.

doi:10.1016/0168-583x(94)95193-4

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1999

2022

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Cited by 5 publications

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“…From tailoring electrical properties, through doping of semiconductors, to synthesizing surface compounds, ion beam deposition has suffered a large evolution along the past decade [1]. From the widely known methods like sputter deposition and ion plating, to the more recently developed ones, like direct ion beam deposition [2], energetic beams are widely used in thin film growth.…”

Section: Introductionmentioning

confidence: 99%