Ion fluxes in medium frequency pulsed DC magnetron sputtering

Rahamathunnisa, M.; Cameron, D.C.

doi:10.1016/j.surfcoat.2010.02.055

Surface and Coatings Technology

2010

DOI: 10.1016/j.surfcoat.2010.02.055

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Ion fluxes in medium frequency pulsed DC magnetron sputtering

M. Rahamathunnisa

D.C. Cameron

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Cited by 4 publications

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Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Dong

et al. 2021

Applied Surface Science

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Ion fluxes in medium frequency pulsed DC magnetron sputtering

Cited by 4 publications

References 12 publications

Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Magnetron sputtering amorphous carbon coatings on metallic lithium: Towards promising anodes for lithium secondary batteries

The frequency of pulsed DC sputtering power introducing the graphitization and the durability improvement of amorphous carbon films for metallic bipolar plates in proton exchange membrane fuel cells

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